Different Etching Mechanisms of Diamond by Oxygen and Hydrogen Plasma: a Reactive Molecular Dynamics Study

Development of a Transferable ReaxFF Parameter Set for Carbon- and Silicon-Based Solid Systems

(2020) Yang Wang et al.   Journal of Physical Chemistry C

Precise characterization of atomic-scale corrosion of single crystal diamond in H2 plasma based on MEMS/NEMS

(2020) Haihua Wu et al.   CORROSION SCIENCE

Reactive Molecular Dynamics Simulations of Atomic Oxygen Impact on Epoxies with Different Chemistries

(2019) Chowdhury Ashraf et al.   Journal of Physical Chemistry C

Etching effects of hydrogen plasma treatment on diamond surfaces

(2019) He Jiang et al.   SURFACE & COATINGS TECHNOLOGY

Diamond Etching Beyond 10 μm with Near-Zero Micromasking

(2019) Marie-Laure Hicks et al.   Scientific Reports

Deterministic Nanopatterning of Diamond Using Electron Beams

(2018) James Bishop et al.   ACS Nano

Tribochemical reactions and graphitization of diamond-like carbon against alumina give volcano-type temperature dependence of friction coefficients: A tight-binding quantum chemical molecular dynamics simulation

(2018) Yang Wang et al.   CARBON

Recent advances in diamond power semiconductor devices

(2018) Hitoshi Umezawa   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Anisotropic diamond etching through thermochemical reaction between Ni and diamond in high-temperature water vapour

(2018) Masatsugu Nagai et al.   Scientific Reports

Atomic Layer Etching: Rethinking the Art of Etch

(2018) Keren J. Kanarik et al.   Journal of Physical Chemistry Letters

Shear melting of silicon and diamond and the disappearance of the polyamorphic transition under shear

(2018) Gianpietro Moras et al.   PHYSICAL REVIEW MATERIALS

Characterizations of etch pits formed on single crystal diamond surface using oxygen/hydrogen plasma surface treatment

(2016) Nobuteru Tsubouchi et al.   DIAMOND AND RELATED MATERIALS

Tight-binding quantum chemical molecular dynamics simulations for the elucidation of chemical reaction dynamics in SiC etching with SF6/O2 plasma

(2016) Hiroshi Ito et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

The ReaxFF reactive force-field: development, applications and future directions

(2016) Thomas P Senftle et al.   npj Computational Materials

Direction dependent etching of diamond surfaces by hyperthermal atomic oxygen: A ReaxFF based molecular dynamics study

(2015) Sriram Goverapet Srinivasan et al.   CARBON

Overview of atomic layer etching in the semiconductor industry

(2015) Keren J. Kanarik et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Tight-Binding Quantum Chemical Molecular Dynamics Simulations of Mechanisms of SiO2 Etching Processes for CF2 and CF3 Radicals

(2014) Hiroshi Ito et al.   Journal of Physical Chemistry C

Surface functionalization of organic semiconductor films by segregated monolayers

(2014) Seiichiro Izawa et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Surface passivation and boundary lubrication of self-mated tetrahedral amorphous carbon asperities under extreme tribological conditions

(2014) Pedro A. Romero et al.   Friction

Structural properties and growth evolution of diamond-like carbon films with different incident energies: A molecular dynamics study

(2013) Xiaowei Li et al.   APPLIED SURFACE SCIENCE

Chemical Reaction Dynamics of SiO2Etching by CF2Radicals: Tight-Binding Quantum Chemical Molecular Dynamics Simulations

(2013) Hiroshi Ito et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Theoretical Studies of the Erosion of (100) and (111) Diamond Surfaces by Hyperthermal O(3P)

(2011) Jeffrey T. Paci et al.   Journal of Physical Chemistry C

Tribochemical Reaction Dynamics Simulation of Hydrogen on a Diamond-like Carbon Surface Based on Tight-Binding Quantum Chemical Molecular Dynamics

(2011) Kentaro Hayashi et al.   Journal of Physical Chemistry C

Impact of keV-energy argon clusters on diamond and graphite

(2011) V.N. Popok et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Anisotropic mechanical amorphization drives wear in diamond

(2010) Lars Pastewka et al.   NATURE MATERIALS

A molecular dynamics study of diamond exposed to tritium bombardment for fusion applications

(2010) A.R. Dunn et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Surface functionalization of thin-film diamond for highly stable and selective biological interfaces

(2010) C. Stavis et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Visualization and analysis of atomistic simulation data with OVITO–the Open Visualization Tool

(2009) Alexander Stukowski   MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING

Hydrogen plasma and atomic oxygen treatments of diamond: Chemical versus morphological effects

(2008) Z. Shpilman et al.   APPLIED PHYSICS LETTERS

Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

(2008) C.L. Lee et al.   DIAMOND AND RELATED MATERIALS

Developments of Plasma Etching Technology for Fabricating Semiconductor Devices

(2008) Haruhiko Abe et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Diamond as an electronic material

(2008) Chris J.H. Wort et al.   Materials Today