Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties
出版年份 2022 全文链接
标题
Surface etching evolution of mechanically polished single crystal diamond with subsurface cleavage in microwave hydrogen plasma: Topography, state and electrical properties
作者
关键词
Subsurface defects, Surface morphology, Hydrogen plasma etching, Electrical property, Single crystal diamond
出版物
VACUUM
Volume 199, Issue -, Pages 110932
出版商
Elsevier BV
发表日期
2022-02-03
DOI
10.1016/j.vacuum.2022.110932
参考文献
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