Structural, electrical, and optical properties of Si-doped ZnO thin films prepared via supercycled atomic layer deposition

Title
Structural, electrical, and optical properties of Si-doped ZnO thin films prepared via supercycled atomic layer deposition
Authors
Keywords
ZnO, Si-doped ZnO, Si substitution, Oxygen vacancy, Atomic layer deposition
Publisher
Elsevier BV
Online
2021-08-20
DOI
10.1016/j.mseb.2021.115401

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