Structural, electrical, and optical properties of Si-doped ZnO thin films prepared via supercycled atomic layer deposition
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Title
Structural, electrical, and optical properties of Si-doped ZnO thin films prepared via supercycled atomic layer deposition
Authors
Keywords
ZnO, Si-doped ZnO, Si substitution, Oxygen vacancy, Atomic layer deposition
Journal
Materials Science and Engineering B-Advanced Functional Solid-State Materials
Volume 273, Issue -, Pages 115401
Publisher
Elsevier BV
Online
2021-08-20
DOI
10.1016/j.mseb.2021.115401
References
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