Atomic Layer Deposition of Zinc Oxide: Diethyl Zinc Reactions and Surface Saturation from First-Principles

Published 2016 View Full Article

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Title
Atomic Layer Deposition of Zinc Oxide: Diethyl Zinc Reactions and Surface Saturation from First-Principles
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 120, Issue 38, Pages 21460-21471
Publisher
American Chemical Society (ACS)
Online
2016-09-01
DOI
10.1021/acs.jpcc.6b06141

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