Preferential growth of ZnO thin films by the atomic layer deposition technique

Title
Preferential growth of ZnO thin films by the atomic layer deposition technique
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 43, Pages 435609
Publisher
IOP Publishing
Online
2008-09-23
DOI
10.1088/0957-4484/19/43/435609

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