Review Article: Atomic layer deposition of doped ZnO films

Published 2019 View Full Article

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Title
Review Article: Atomic layer deposition of doped ZnO films
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 37, Issue 5, Pages 050802
Publisher
American Vacuum Society
Online
2019-08-16
DOI
10.1116/1.5112777

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