Structural, electrical, and optical properties of Si-doped ZnO thin films prepared via supercycled atomic layer deposition

标题
Structural, electrical, and optical properties of Si-doped ZnO thin films prepared via supercycled atomic layer deposition
作者
关键词
ZnO, Si-doped ZnO, Si substitution, Oxygen vacancy, Atomic layer deposition
出版商
Elsevier BV
发表日期
2021-08-20
DOI
10.1016/j.mseb.2021.115401

向作者/读者发起求助以获取更多资源

Reprint

联系作者

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started