Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering

Published 2007 View Full Article

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Title
Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 8, Pages 2017-2021
Publisher
Elsevier BV
Online
2007-07-11
DOI
10.1016/j.tsf.2007.06.173

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