Improved chemical mechanical polishing performance in 4H-SiC substrate by combining novel mixed abrasive slurry and photocatalytic effect

Improvement in chemical mechanical polishing of 4H-SiC wafer by activating persulfate through the synergistic effect of UV and TiO2

(2021) Wantang Wang et al.   JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

A novel slurry for chemical mechanical polishing of single crystal diamond

(2021) Longxing Liao et al.   APPLIED SURFACE SCIENCE

Advanced chemical–mechanical planarization for 4H-SiC substrate by water-soluble inclusion complexes of fullerene

(2020) Yueh-Hsun Tsai et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Highly efficient chemical mechanical polishing method for SiC substrates using enhanced slurry containing bubbles of ozone gas

(2020) Michio Uneda et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

High-performance chemical mechanical polishing slurry for aluminum alloy using hybrid abrasives of zirconium phosphate and alumina

(2020) Tao Li et al.   APPLIED SURFACE SCIENCE

Enhancement mechanism of chemical mechanical polishing for single-crystal 6H-SiC based on Electro-Fenton reaction

(2020) Jiayun Deng et al.   DIAMOND AND RELATED MATERIALS

Ultrahigh Recovery of Fracture Strength on Mismatched Fractured Amorphous Surfaces of Silicon Carbide

(2019) Junfeng Cui et al.   ACS Nano

Novel polystyrene/CeO2-TiO2 multicomponent core/shell abrasives for high-efficiency and high-quality photocatalytic-assisted chemical mechanical polishing of reaction-bonded silicon carbide

(2019) Bo Gao et al.   APPLIED SURFACE SCIENCE

Unprecedented Piezoresistance Coefficient in Strained Silicon Carbide

(2019) Junfeng Cui et al.   NANO LETTERS

Development of a novel chemical mechanical polishing slurry and its polishing mechanisms on a nickel alloy

(2019) Zhenyu Zhang et al.   APPLIED SURFACE SCIENCE

The influences of technological parameters on the ultraviolet photocatalytic reaction rate and photocatalysis-assisted polishing effect for SiC

(2019) Qiusheng Yan et al.   JOURNAL OF CRYSTAL GROWTH

A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry

(2018) Zhenyu Zhang et al.   APPLIED SURFACE SCIENCE

Design of ceria grafted mesoporous silica composite particles for high-efficiency and damage-free oxide chemical mechanical polishing

(2018) Yang Chen et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Mechanism of Reduced Sintering Temperature of Al2O3–ZrO2 Nanocomposites Obtained by Microwave Hydrothermal Synthesis

(2018) Iwona Koltsov et al.   Materials

Modification of Talc@TiO2 toward high-performance nitrile rubber application

(2018) Chao He et al.   RSC Advances

In situ TEM observation of rebonding on fractured silicon carbide

(2018) Zhenyu Zhang et al.   Nanoscale

Carbon quantum dots-decorated nano-zirconia: A highly efficient photocatalyst

(2018) S.P. Ratnayake et al.   APPLIED CATALYSIS A-GENERAL

Environment friendly chemical mechanical polishing of copper

(2018) Zhenyu Zhang et al.   APPLIED SURFACE SCIENCE

Highly efficient removal of sapphire by composite nanoabrasive with novel inorganic polyelectrolyte as a binder

(2018) Tianxian Wang et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Polishing-pad-free electrochemical mechanical polishing of single-crystalline SiC surfaces using polyurethane–CeO2 core–shell particles

(2017) Junji Murata et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

UV-TiO2 photocatalysis-assisted chemical mechanical polishing 4H-SiC wafer

(2017) Zewei Yuan et al.   MATERIALS AND MANUFACTURING PROCESSES

Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing

(2016) Yongchao Xu et al.   APPLIED SURFACE SCIENCE

Hollow microspheres Mg-doped ZrO 2 nanoparticles: Green assisted synthesis and applications in photocatalysis and photoluminescence

(2016) L. Renuka et al.   JOURNAL OF ALLOYS AND COMPOUNDS

A comparative study on the material removal mechanisms of 6H-SiC polished by semi-fixed and fixed diamond abrasive tools

(2016) Q.F. Luo et al.   WEAR

Polymethylmethacrylate (PMMA)/CeO 2 hybrid particles for enhanced chemical mechanical polishing performance

(2015) Yang Chen et al.   TRIBOLOGY INTERNATIONAL

XPS, UV–vis spectroscopy and AFM studies on removal mechanisms of Si-face SiC wafer chemical mechanical polishing (CMP)

(2014) Yan Zhou et al.   APPLIED SURFACE SCIENCE

Study of Raman spectra for γ-Al2O3 models by using first-principles method

(2013) Yong Liu et al.   SOLID STATE COMMUNICATIONS

Elaboration of Alumina-Zirconia Composites: Role of the Zirconia Content on the Microstructure and Mechanical Properties

(2013) Valentina Naglieri et al.   Materials

Hydrogen Generation by Hydrolysis of an Al/Al2O3-Composite Powder After Heat Treatment

(2013) Xiani Huang et al.   Energy Technology

Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate

(2010) Zefang Zhang et al.   APPLIED SURFACE SCIENCE

Hybrid polishing mechanism of single crystal SiC using mixed abrasive slurry (MAS)

(2010) H.S. Lee et al.   CIRP ANNALS-MANUFACTURING TECHNOLOGY

Removal Behaviors of Different SiC Ceramics during Polishing

(2010) Guiling Liu et al.   JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY

A study on the chemical mechanical polishing of oxide film using a zirconia (ZrO2)-mixed abrasive slurry (MAS)

(2008) Sung-Woo Park et al.   MICROELECTRONIC ENGINEERING