Novel polystyrene/CeO2-TiO2 multicomponent core/shell abrasives for high-efficiency and high-quality photocatalytic-assisted chemical mechanical polishing of reaction-bonded silicon carbide

Published 2019 View Full Article

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Title
Novel polystyrene/CeO2-TiO2 multicomponent core/shell abrasives for high-efficiency and high-quality photocatalytic-assisted chemical mechanical polishing of reaction-bonded silicon carbide
Authors
Keywords
Core/shell abrasives, Photocatalytic activity, Chemical mechanical polishing, Reaction-bonded silicon carbide
Journal
APPLIED SURFACE SCIENCE
Volume 484, Issue -, Pages 534-541
Publisher
Elsevier BV
Online
2019-04-05
DOI
10.1016/j.apsusc.2019.04.037

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