High-performance chemical mechanical polishing slurry for aluminum alloy using hybrid abrasives of zirconium phosphate and alumina
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Title
High-performance chemical mechanical polishing slurry for aluminum alloy using hybrid abrasives of zirconium phosphate and alumina
Authors
Keywords
Chemical mechanical polishing, Polishing mechanism, Zirconium phosphate, Aluminum oxide, Hybrid abrasives
Journal
APPLIED SURFACE SCIENCE
Volume 537, Issue -, Pages 147859
Publisher
Elsevier BV
Online
2020-09-12
DOI
10.1016/j.apsusc.2020.147859
References
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