Highly efficient removal of sapphire by composite nanoabrasive with novel inorganic polyelectrolyte as a binder

Published 2018 View Full Article

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Title
Highly efficient removal of sapphire by composite nanoabrasive with novel inorganic polyelectrolyte as a binder
Authors
Keywords
Novel inorganic polyelectrolyte, Composite abrasive, Chemical mechanical polishing, High material removal rate, Mechanism, Sapphire
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 782, Issue -, Pages 709-715
Publisher
Elsevier BV
Online
2018-12-20
DOI
10.1016/j.jallcom.2018.11.416

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