Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing

Published 2016 View Full Article

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Title
Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing
Authors
Keywords
Sapphire, Mixed abrasive, Solid state reaction, Removal mechanism
Journal
APPLIED SURFACE SCIENCE
Volume 389, Issue -, Pages 713-720
Publisher
Elsevier BV
Online
2016-07-31
DOI
10.1016/j.apsusc.2016.07.155

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