Enhanced Ferroelectric Properties in Hf 0.5 Zr 0.5 O 2 Films Using a HfO 0.61 N 0.72 Interfacial Layer
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Title
Enhanced Ferroelectric Properties in Hf
0.5
Zr
0.5
O
2
Films Using a HfO
0.61
N
0.72
Interfacial Layer
Authors
Keywords
-
Journal
Advanced Electronic Materials
Volume -, Issue -, Pages 2100042
Publisher
Wiley
Online
2021-05-10
DOI
10.1002/aelm.202100042
References
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