Enhanced Ferroelectric Properties in Hf 0.5 Zr 0.5 O 2 Films Using a HfO 0.61 N 0.72 Interfacial Layer
出版年份 2021 全文链接
标题
Enhanced Ferroelectric Properties in Hf
0.5
Zr
0.5
O
2
Films Using a HfO
0.61
N
0.72
Interfacial Layer
作者
关键词
-
出版物
Advanced Electronic Materials
Volume -, Issue -, Pages 2100042
出版商
Wiley
发表日期
2021-05-10
DOI
10.1002/aelm.202100042
参考文献
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