Comparative study of oxidizing ambient infused with varying nitrogen flow rates for fabrication of ternary nitrided AlZrO based MOS capacitor

Title
Comparative study of oxidizing ambient infused with varying nitrogen flow rates for fabrication of ternary nitrided AlZrO based MOS capacitor
Authors
Keywords
-
Journal
Publisher
Wiley
Online
2020-10-10
DOI
10.1002/er.6037

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