Comparative study of oxidizing ambient infused with varying nitrogen flow rates for fabrication of ternary nitrided AlZrO based MOS capacitor
Published 2020 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Comparative study of oxidizing ambient infused with varying nitrogen flow rates for fabrication of ternary nitrided
AlZrO
based
MOS
capacitor
Authors
Keywords
-
Journal
INTERNATIONAL JOURNAL OF ENERGY RESEARCH
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2020-10-10
DOI
10.1002/er.6037
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Dual-step grown ternary aluminium zirconium oxide and its characteristics for metal-oxide-semiconductor capacitor
- (2020) Way Foong Lim et al. CERAMICS INTERNATIONAL
- Optimizing Al-doped ZrO2 as gate dielectric of MoS2 field-effect transistors
- (2019) Xingjuan Song et al. NANOTECHNOLOGY
- A two-step growth route of ternary aluminium doped zirconium oxide film on silicon
- (2018) Hock Jin Quah et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Feasibility of Atomic Layer Deposited AlZrOx Film to Achieve High Performance and Good Stability of ZnSnO-TFT
- (2017) Jun Li et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- A significant enhancement in the photoluminescence emission of the Mg doped ZrO2 thin films by tailoring the effect of oxygen vacancy
- (2017) S. Salari et al. JOURNAL OF LUMINESCENCE
- Atomic layer deposition deposited high dielectric constant (κ) ZrAlO x gate insulator enabling high performance ZnSnO thin film transistors
- (2017) Chuan-Xin Huang et al. SUPERLATTICES AND MICROSTRUCTURES
- Tuning the electrical performance and bias stability of a semiconducting SWCNT thin film transistor with an atomic layer deposited AlZrOx composite
- (2017) Jun Li et al. RSC Advances
- Microstructure, optical and electrical properties of solution-derived peroxo-zirconium oxide gate dielectrics for CMOS application
- (2016) Dongqi Xiao et al. CERAMICS INTERNATIONAL
- Improved Charge-Trapping Characteristics of ZrO2by Al Doping for Nonvolatile Memory Applications
- (2016) X. D. Huang et al. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
- Effect of temperature on the crystallinity, size and fluorescent properties of zirconia-based nanoparticles
- (2015) F.J. Pereira et al. MATERIALS CHEMISTRY AND PHYSICS
- Effects of ultraviolet-assisted electrochemical etching current densities on structural and optical characteristics of porous quaternary AlInGaN alloys
- (2015) Hock Jin Quah et al. Arabian Journal of Chemistry
- Retardation Mechanism of Ultrathin Al2O3 Interlayer on Y2O3 Passivated Gallium Nitride Surface
- (2014) Hock Jin Quah et al. ACS Applied Materials & Interfaces
- Synthesis and characterization of novel ZrO2-SiO2 mixed oxides
- (2014) Milena Araújo Ferreira e Santos et al. Materials Research-Ibero-american Journal of Materials
- Effects of post-deposition annealing ambient on chemical, structural, and electrical properties of RF magnetron sputtered Y2O3 gate on gallium nitride
- (2013) Hock Jin Quah et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Structural and electrical properties of atomic layer deposited Al-doped ZrO2 films and of the interface with TaN electrode
- (2012) S. Spiga et al. JOURNAL OF APPLIED PHYSICS
- Influence of post-deposition annealing in oxygen ambient on metal–organic decomposed CeO2 film spin coated on 4H-SiC
- (2011) Way Foong Lim et al. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
- Band-gap energy estimation from diffuse reflectance measurements on sol–gel and commercial TiO2: a comparative study
- (2011) Rosendo López et al. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
- Frequency and voltage dependency of interface states and series resistance in Al/SiO2/p-Si MOS structure
- (2011) Hong Xiao et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Optical bandgap widening of p-type Cu2O films by nitrogen doping
- (2009) Yoshitaka Nakano et al. APPLIED PHYSICS LETTERS
- Electrochromic TiO2, ZrO2 and TiO2–ZrO2 thin films by dip-coating method
- (2009) T. Ivanova et al. Materials Science and Engineering B-Advanced Functional Solid-State Materials
- Analysis of electrical characteristics of Au/SiO2/n-Si (MOS) capacitors using the high–low frequency capacitance and conductance methods
- (2008) A. Tataroğlu et al. MICROELECTRONIC ENGINEERING
- Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering
- (2007) D.H. Trinh et al. THIN SOLID FILMS
Discover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversationCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now