Analysis of electrical characteristics of Au/SiO2/n-Si (MOS) capacitors using the high–low frequency capacitance and conductance methods

Published 2008 View Full Article

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Title
Analysis of electrical characteristics of Au/SiO2/n-Si (MOS) capacitors using the high–low frequency capacitance and conductance methods
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 11, Pages 2256-2260
Publisher
Elsevier BV
Online
2008-07-13
DOI
10.1016/j.mee.2008.07.001

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