A two-step growth route of ternary aluminium doped zirconium oxide film on silicon

Published 2018 View Full Article

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Title
A two-step growth route of ternary aluminium doped zirconium oxide film on silicon
Authors
Keywords
Co-sputtering, Growth, Al, x, Zr, y, O, z, Oxygen interstitials, Vacancies, Metal-oxide-semiconductor
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 777, Issue -, Pages 736-748
Publisher
Elsevier BV
Online
2018-11-04
DOI
10.1016/j.jallcom.2018.10.359

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