Comparative study of oxidizing ambient infused with varying nitrogen flow rates for fabrication of ternary nitrided AlZrO based MOS capacitor
出版年份 2020 全文链接
标题
Comparative study of oxidizing ambient infused with varying nitrogen flow rates for fabrication of ternary nitrided
AlZrO
based
MOS
capacitor
作者
关键词
-
出版物
INTERNATIONAL JOURNAL OF ENERGY RESEARCH
Volume -, Issue -, Pages -
出版商
Wiley
发表日期
2020-10-10
DOI
10.1002/er.6037
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Dual-step grown ternary aluminium zirconium oxide and its characteristics for metal-oxide-semiconductor capacitor
- (2020) Way Foong Lim et al. CERAMICS INTERNATIONAL
- Optimizing Al-doped ZrO2 as gate dielectric of MoS2 field-effect transistors
- (2019) Xingjuan Song et al. NANOTECHNOLOGY
- A two-step growth route of ternary aluminium doped zirconium oxide film on silicon
- (2018) Hock Jin Quah et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Feasibility of Atomic Layer Deposited AlZrOx Film to Achieve High Performance and Good Stability of ZnSnO-TFT
- (2017) Jun Li et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- A significant enhancement in the photoluminescence emission of the Mg doped ZrO2 thin films by tailoring the effect of oxygen vacancy
- (2017) S. Salari et al. JOURNAL OF LUMINESCENCE
- Atomic layer deposition deposited high dielectric constant (κ) ZrAlO x gate insulator enabling high performance ZnSnO thin film transistors
- (2017) Chuan-Xin Huang et al. SUPERLATTICES AND MICROSTRUCTURES
- Tuning the electrical performance and bias stability of a semiconducting SWCNT thin film transistor with an atomic layer deposited AlZrOx composite
- (2017) Jun Li et al. RSC Advances
- Microstructure, optical and electrical properties of solution-derived peroxo-zirconium oxide gate dielectrics for CMOS application
- (2016) Dongqi Xiao et al. CERAMICS INTERNATIONAL
- Improved Charge-Trapping Characteristics of ZrO2by Al Doping for Nonvolatile Memory Applications
- (2016) X. D. Huang et al. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
- Effect of temperature on the crystallinity, size and fluorescent properties of zirconia-based nanoparticles
- (2015) F.J. Pereira et al. MATERIALS CHEMISTRY AND PHYSICS
- Effects of ultraviolet-assisted electrochemical etching current densities on structural and optical characteristics of porous quaternary AlInGaN alloys
- (2015) Hock Jin Quah et al. Arabian Journal of Chemistry
- Retardation Mechanism of Ultrathin Al2O3 Interlayer on Y2O3 Passivated Gallium Nitride Surface
- (2014) Hock Jin Quah et al. ACS Applied Materials & Interfaces
- Synthesis and characterization of novel ZrO2-SiO2 mixed oxides
- (2014) Milena Araújo Ferreira e Santos et al. Materials Research-Ibero-american Journal of Materials
- Effects of post-deposition annealing ambient on chemical, structural, and electrical properties of RF magnetron sputtered Y2O3 gate on gallium nitride
- (2013) Hock Jin Quah et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Structural and electrical properties of atomic layer deposited Al-doped ZrO2 films and of the interface with TaN electrode
- (2012) S. Spiga et al. JOURNAL OF APPLIED PHYSICS
- Influence of post-deposition annealing in oxygen ambient on metal–organic decomposed CeO2 film spin coated on 4H-SiC
- (2011) Way Foong Lim et al. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
- Band-gap energy estimation from diffuse reflectance measurements on sol–gel and commercial TiO2: a comparative study
- (2011) Rosendo López et al. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
- Frequency and voltage dependency of interface states and series resistance in Al/SiO2/p-Si MOS structure
- (2011) Hong Xiao et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Optical bandgap widening of p-type Cu2O films by nitrogen doping
- (2009) Yoshitaka Nakano et al. APPLIED PHYSICS LETTERS
- Electrochromic TiO2, ZrO2 and TiO2–ZrO2 thin films by dip-coating method
- (2009) T. Ivanova et al. Materials Science and Engineering B-Advanced Functional Solid-State Materials
- Analysis of electrical characteristics of Au/SiO2/n-Si (MOS) capacitors using the high–low frequency capacitance and conductance methods
- (2008) A. Tataroğlu et al. MICROELECTRONIC ENGINEERING
- Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering
- (2007) D.H. Trinh et al. THIN SOLID FILMS
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExplorePublish scientific posters with Peeref
Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.
Learn More