Comparative study of oxidizing ambient infused with varying nitrogen flow rates for fabrication of ternary nitrided AlZrO based MOS capacitor

标题
Comparative study of oxidizing ambient infused with varying nitrogen flow rates for fabrication of ternary nitrided AlZrO based MOS capacitor
作者
关键词
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出版物
出版商
Wiley
发表日期
2020-10-10
DOI
10.1002/er.6037

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