Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering

Published 2007 View Full Article

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Title
Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 15, Pages 4977-4982
Publisher
Elsevier BV
Online
2007-10-12
DOI
10.1016/j.tsf.2007.10.001

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