Microstructure, optical and electrical properties of solution-derived peroxo-zirconium oxide gate dielectrics for CMOS application

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Title
Microstructure, optical and electrical properties of solution-derived peroxo-zirconium oxide gate dielectrics for CMOS application
Authors
Keywords
C. Electrical properties, Metal-oxide-semiconductor, Sol–gel, Conduction mechanisms, High-k gate dielectrics
Journal
CERAMICS INTERNATIONAL
Volume 42, Issue 1, Pages 759-766
Publisher
Elsevier BV
Online
2015-09-12
DOI
10.1016/j.ceramint.2015.08.177

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