Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer Deposition
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Title
Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer Deposition
Authors
Keywords
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Journal
Nanoscale Research Letters
Volume 15, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2020-07-29
DOI
10.1186/s11671-020-03382-1
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