Surface Loss in Ozone-Based Atomic Layer Deposition Processes

Title
Surface Loss in Ozone-Based Atomic Layer Deposition Processes
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 23, Issue 9, Pages 2381-2387
Publisher
American Chemical Society (ACS)
Online
2011-04-14
DOI
10.1021/cm2001144

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