Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer Deposition

标题
Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer Deposition
作者
关键词
-
出版物
Nanoscale Research Letters
Volume 15, Issue 1, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2020-07-29
DOI
10.1186/s11671-020-03382-1

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