Toward Thick Piezoelectric HfO 2 ‐Based Films

Title
Toward Thick Piezoelectric HfO 2 ‐Based Films
Authors
Keywords
-
Journal
Physica Status Solidi-Rapid Research Letters
Volume 14, Issue 3, Pages 1900626
Publisher
Wiley
Online
2019-12-02
DOI
10.1002/pssr.201900626

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