Chemical solution deposition of ferroelectric Sr:HfO 2 film from inorganic salt precursors

Published 2018 View Full Article

Authors

Keywords

Hafnium oxide, Thin films, Chemical solution deposition, Ferroelectricity, Sr doping

Journal

JOURNAL OF ALLOYS AND COMPOUNDS

Volume 731, Issue -, Pages 546-553

Publisher

Elsevier BV

Online

2017-09-26

DOI

10.1016/j.jallcom.2017.09.264

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