Low-Energy Path to Dense HfO2Thin Films with Aqueous Precursor

Title
Low-Energy Path to Dense HfO2Thin Films with Aqueous Precursor
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 23, Issue 4, Pages 945-952
Publisher
American Chemical Society (ACS)
Online
2011-01-19
DOI
10.1021/cm102082j

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