标题
Toward Thick Piezoelectric HfO
2
‐Based Films
作者
关键词
-
出版物
Physica Status Solidi-Rapid Research Letters
Volume 14, Issue 3, Pages 1900626
出版商
Wiley
发表日期
2019-12-02
DOI
10.1002/pssr.201900626
参考文献
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