Fracture strength of micro- and nano-scale silicon components

Stress mapping of micromachined polycrystalline silicon devices via confocal Raman microscopy

(2014) Grant A. Myers et al.   APPLIED PHYSICS LETTERS

Crack stability in edge-notched clamped beam specimens: modeling and experiments

(2014) B. Nagamani Jaya et al.   INTERNATIONAL JOURNAL OF FRACTURE

A microelectromechanical system for thermomechanical testing of nanostructures

(2013) Tzu-Hsuan Chang et al.   APPLIED PHYSICS LETTERS

Decoupling small-scale roughness and long-range features on deep reactive ion etched silicon surfaces

(2013) Frank W. DelRio et al.   JOURNAL OF APPLIED PHYSICS

A Simple Experimental Technique for Measuring the Poisson's Ratio of Microstructures

(2013) Takahiro Namazu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Etching Process Effects on Surface Structure, Fracture Strength, and Reliability of Single-Crystal Silicon Theta-Like Specimens

(2013) Michael S. Gaither et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity

(2013) Tomoki Tanemura et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Dynamic crack surface instabilities initiated at dopants

(2013) Liron Ben-Bashat Bergman et al.   SCRIPTA MATERIALIA

On the bending strength of single-crystal silicon theta-like specimens

(2013) Rebecca Kirkpatrick et al.   MRS Communications

Strain in silicon nanowire beams

(2012) Ferran Ureña et al.   JOURNAL OF APPLIED PHYSICS

Mechanical characterization of materials at small length scales

(2012) Maria F. Pantano et al.   Journal of Mechanical Science and Technology

Ultimate Bending Strength of Si Nanowires

(2012) G. Stan et al.   NANO LETTERS

Mechanical Properties of Si Nanowires as Revealed by in Situ Transmission Electron Microscopy and Molecular Dynamics Simulations

(2012) Dai-Ming Tang et al.   NANO LETTERS

Deformation and fracture of single-crystal silicon theta-like specimens

(2011) Michael S. Gaither et al.   JOURNAL OF MATERIALS RESEARCH

On-chip tensile testing of nanoscale silicon free-standing beams

(2011) Umesh Bhaskar et al.   JOURNAL OF MATERIALS RESEARCH

Bending manipulation and measurements of fracture strength of silicon and oxidized silicon nanowires by atomic force microscopy

(2011) Gheorghe Stan et al.   JOURNAL OF MATERIALS RESEARCH

Compact On-Chip Microtensile Tester With Prehensile Grip Mechanism

(2011) Siddharth S. Hazra et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Predicting Fracture in Micrometer-Scale Polycrystalline Silicon MEMS Structures

(2011) E. David Reedy et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Unified nano-mechanics based probabilistic theory of quasibrittle and brittle structures: I. Strength, static crack growth, lifetime and scaling

(2011) Jia-Liang Le et al.   JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS

Prototype cantilevers for quantitative lateral force microscopy

(2011) Mark G. Reitsma et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Measurement of Poisson’s ratio by means of a direct tension test on micron-sized specimens

(2011) Leslie Banks-Sills et al.   SENSORS AND ACTUATORS A-PHYSICAL

Effect of humidity and temperature on the fatigue behavior of polysilicon thin film

(2011) Shoji Kamiya et al.   SENSORS AND ACTUATORS A-PHYSICAL

A microsystem for the fracture characterization of polysilicon at the micro-scale

(2010) A. Corigliano et al.   EUROPEAN JOURNAL OF MECHANICS A-SOLIDS

Singular Stress Fields at the Intersection of a Grain Boundary and a Stress-Free Edge in a Columnar Polycrystal

(2010) E. D. Reedy   JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME

Compressive Stress Effect on the Radial Elastic Modulus of Oxidized Si Nanowires

(2010) G. Stan et al.   NANO LETTERS

Strength distribution of single-crystal silicon theta-like specimens

(2010) Michael S. Gaither et al.   SCRIPTA MATERIALIA

Corrosion mechanism and surface passivation strategies of polycrystalline silicon electrodes

(2010) Fang Liu et al.   SENSORS AND ACTUATORS A-PHYSICAL

A Methodology for Accurately Measuring Mechanical Properties on the Micro-Scale

(2010) L. Banks-Sills et al.   STRAIN

Stronger silicon for microsystems

(2009) B.L. Boyce et al.   ACTA MATERIALIA

Brittle-to-Ductile Transition in Uniaxial Compression of Silicon Pillars at Room Temperature

(2009) Fredrik Östlund et al.   ADVANCED FUNCTIONAL MATERIALS

On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator

(2009) A. Corigliano et al.   EXPERIMENTAL MECHANICS

A Sequential Tensile Method for Rapid Characterization of Extreme-value Behavior in Microfabricated Materials

(2009) B. L. Boyce   EXPERIMENTAL MECHANICS

Wafer-Scale Microtensile Testing of Thin Films

(2009) J. Gaspar et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films

(2009) S. Gravier et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Polysilicon MEMS accelerometers exposed to shocks: numerical–experimental investigation

(2009) Aldo Ghisi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Demonstration of anin situon-chip tensile tester

(2009) Siddharth S Hazra et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Mechanical Properties of Vapor−Liquid−Solid Synthesized Silicon Nanowires

(2009) Yong Zhu et al.   NANO LETTERS

Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach

(2009) Stefano Mariani et al.   SENSORS

Connections between morphological and mechanical evolution during galvanic corrosion of micromachined polycrystalline and monocrystalline silicon

(2008) David C. Miller et al.   JOURNAL OF APPLIED PHYSICS

In situ compression tests on micron-sized silicon pillars by Raman microscopy—Stress measurements and deformation analysis

(2008) K. Wasmer et al.   JOURNAL OF MATERIALS RESEARCH

Fracture Toughness, Fracture Strength, and Stress Corrosion Cracking of Silicon Dioxide Thin Films

(2008) V. Hatty et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

An argument for proof testing brittle microsystems in high-reliability applications

(2008) B L Boyce et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Relation Between Morphology, Etch Rate, Surface Wetting, and Electrochemical Characteristics for Micromachined Silicon Subject to Galvanic Corrosion

(2008) David C. Miller et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

On the toughening of brittle materials by grain bridging: Promoting intergranular fracture through grain angle, strength, and toughness

(2008) J.W. Foulk et al.   JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS

Resistance of through-thickness grain boundaries to cleavage cracking in silicon thin films

(2008) Yu Qiao et al.   SCRIPTA MATERIALIA

Capillary adhesion model for contacting micromachined surfaces

(2008) Frank W. DelRio et al.   SCRIPTA MATERIALIA

Surface oxide effects on failure of polysilicon MEMS after cyclic and monotonic loading

(2008) H. Kahn et al.   SCRIPTA MATERIALIA

Numerical Simulation of Impact-Induced Rupture in Polysilicon MEMS

(2008) Alberto Corigliano et al.   Sensor Letters

Effect of post-release sidewall morphology on the fracture and fatigue properties of polycrystalline silicon structural films

(2008) D.H. Alsem et al.   SENSORS AND ACTUATORS A-PHYSICAL

Fabrication and Characterization of Patterned Single-Crystal Silicon Nanolines

(2007) Bin Li et al.   NANO LETTERS

Cathodic corrosion of polycrystalline silicon MEMS

(2007) Melitta Hon et al.   SENSORS AND ACTUATORS A-PHYSICAL