Journal
SENSOR LETTERS
Volume 6, Issue 1, Pages 35-42Publisher
AMER SCIENTIFIC PUBLISHERS
DOI: 10.1166/sl.2008.008
Keywords
micro electro mechanical systems (MEMS); accidental drop; numerical FE simulation
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The problem of impact rupture in polysilicon MEMS is addressed in this paper employing a numerical 2D geometrical model for the polycrystal obtained by means of a Voronoi tessellation coupled with a Finite Element (FE) mesh. The intergranular and transgranular rupture is modelled by means of cohesive traction-jumps softening laws; accidental drop is simulated through a simplified three-level, global-local, multi scale approach.
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