Etching Process Effects on Surface Structure, Fracture Strength, and Reliability of Single-Crystal Silicon Theta-Like Specimens

Deformation and fracture of single-crystal silicon theta-like specimens

(2011) Michael S. Gaither et al.   JOURNAL OF MATERIALS RESEARCH

Predicting Fracture in Micrometer-Scale Polycrystalline Silicon MEMS Structures

(2011) E. David Reedy et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

25year perspectiveAspects of strain and strength measurement in miniaturised testing for engineering metals and ceramics

(2010) J. D. Lord et al.   MATERIALS SCIENCE AND TECHNOLOGY

Frictional aging, de-aging, and re-aging in a monolayer-coated micromachined interface

(2010) Alex D. Corwin et al.   PHYSICAL REVIEW B

Strength distribution of single-crystal silicon theta-like specimens

(2010) Michael S. Gaither et al.   SCRIPTA MATERIALIA

A Methodology for Accurately Measuring Mechanical Properties on the Micro-Scale

(2010) L. Banks-Sills et al.   STRAIN

A Sequential Tensile Method for Rapid Characterization of Extreme-value Behavior in Microfabricated Materials

(2009) B. L. Boyce   EXPERIMENTAL MECHANICS

Demonstration of anin situon-chip tensile tester

(2009) Siddharth S Hazra et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Capillary adhesion model for contacting micromachined surfaces

(2008) Frank W. DelRio et al.   SCRIPTA MATERIALIA