On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator

Published 2009 View Full Article

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Title
On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator
Authors
Keywords
-
Journal
EXPERIMENTAL MECHANICS
Volume 50, Issue 6, Pages 695-707
Publisher
Springer Nature
Online
2009-06-29
DOI
10.1007/s11340-009-9266-1

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