Fracture Toughness, Fracture Strength, and Stress Corrosion Cracking of Silicon Dioxide Thin Films

Published 2008 View Full Article

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Title
Fracture Toughness, Fracture Strength, and Stress Corrosion Cracking of Silicon Dioxide Thin Films
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 4, Pages 943-947
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-08-07
DOI
10.1109/jmems.2008.927069

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