Polysilicon MEMS accelerometers exposed to shocks: numerical–experimental investigation

Title
Polysilicon MEMS accelerometers exposed to shocks: numerical–experimental investigation
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 3, Pages 035023
Publisher
IOP Publishing
Online
2009-02-24
DOI
10.1088/0960-1317/19/3/035023

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