High-performance HfO x /AlO y -based resistive switching memory cross-point array fabricated by atomic layer deposition
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Title
High-performance HfO x /AlO y -based resistive switching memory cross-point array fabricated by atomic layer deposition
Authors
Keywords
RRAM, Cross-point array, Atomic layer deposition (ALD)
Journal
Nanoscale Research Letters
Volume 10, Issue 1, Pages -
Publisher
Springer Nature
Online
2015-02-17
DOI
10.1186/s11671-015-0738-1
References
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