Orientation of AlN Grains Nucleated on Different Diamond Substrates by Magnetron Sputtering

Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel

(2017) Masataka Imura et al.   JOURNAL OF APPLIED PHYSICS

Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering

(2017) Olaf Zywitzki et al.   SURFACE & COATINGS TECHNOLOGY

Anomalous elongation of c-axis of AlN on Al 2 O 3 grown by MBE using NH 3 -cluster ions

(2016) Yoshihiro Ichinohe et al.   JOURNAL OF CRYSTAL GROWTH

Template effect in TiN/AlN multilayered coatings from first principles

(2015) Deqiang Yin et al.   CERAMICS INTERNATIONAL

Epitaxial growth of group III-nitride films by pulsed laser deposition and their use in the development of LED devices

(2015) Guoqiang Li et al.   SURFACE SCIENCE REPORTS

Synthesis and characterization of 10 nm thick piezoelectric AlN films with high c-axis orientation for miniaturized nanoelectromechanical devices

(2014) Usama Zaghloul et al.   APPLIED PHYSICS LETTERS

Epitaxial growth of high quality AlN films on metallic aluminum substrates

(2014) Wenliang Wang et al.   CRYSTENGCOMM

The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films

(2014) P. M. Mayrhofer et al.   JOURNAL OF APPLIED PHYSICS

Super-high-frequency SAW transducer utilizing AIN/ultrananocrystalline diamond architectures

(2013) A. B. A. Dow et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM

(2013) F. Lloret et al.   MICROELECTRONIC ENGINEERING

Effect of low RF bias potential on AlN films obtained by Microwave Plasma Enhanced Chemical Vapor Deposition

(2013) G. Sánchez et al.   SURFACE & COATINGS TECHNOLOGY

Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working pressures

(2013) K. Ait Aissa et al.   THIN SOLID FILMS

Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films

(2012) M. Schneider et al.   APPLIED PHYSICS LETTERS

Enhanced thermal conductivity of polycrystalline aluminum nitride thin films by optimizing the interface structure

(2012) T. S. Pan et al.   JOURNAL OF APPLIED PHYSICS

Residual stress of AlN films RF sputter deposited on Si(111) substrate

(2012) Hui Zhong et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators

(2011) J.G. Rodríguez-Madrid et al.   MATERIALS LETTERS

Interfacial Microstructure Evolution of (B, Al)N Films Grown on Diamond Substrates

(2011) Jen-Hao Song et al.   THIN SOLID FILMS

Growth of highly c-axis oriented (B, Al)N film on diamond for high frequency surface acoustic wave devices

(2011) Jen-Hao Song et al.   THIN SOLID FILMS

Effect of substrate roughness on c-oriented AlN thin films

(2009) Alvaro Artieda et al.   JOURNAL OF APPLIED PHYSICS

Growth mechanism of c-axis-oriented AlN on (111) diamond substrates by metal-organic vapor phase epitaxy

(2009) Masataka Imura et al.   JOURNAL OF CRYSTAL GROWTH