Synthesis and characterization of 10 nm thick piezoelectric AlN films with high c-axis orientation for miniaturized nanoelectromechanical devices

Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches

(2012) Nipun Sinha et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Nanoelectromechanical contact switches

(2012) Owen Y. Loh et al.   Nature Nanotechnology

50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection

(2011) P Ivaldi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Deposition of ultrathin AlN films for high frequency electroacoustic devices

(2011) Valery V. Felmetsger et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Nanoelectromechanical torsion switch of low operation voltage for nonvolatile memory application

(2010) Wenfeng Xiang et al.   APPLIED PHYSICS LETTERS

Perfectly Complementary Relay Design for Digital Logic Applications

(2010) Jaeseok Jeon et al.   IEEE ELECTRON DEVICE LETTERS

Electromechanical Computing at 500°C with Silicon Carbide

(2010) Te-Hao Lee et al.   SCIENCE

Buckling beam micromechanical memory with on-chip readout

(2009) D. Roodenburg et al.   APPLIED PHYSICS LETTERS

Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

(2009) R. B. Karabalin et al.   APPLIED PHYSICS LETTERS

Piezoelectric aluminum nitride nanoelectromechanical actuators

(2009) Nipun Sinha et al.   APPLIED PHYSICS LETTERS

Ultralow Voltage Crossbar Nonvolatile Memory Based on Energy-Reversible NEM Switches

(2009) K. Akarvardar et al.   IEEE ELECTRON DEVICE LETTERS

Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering

(2009) S. M. Tanner et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Design, operation mode, and stress control capability of S-Gun magnetron for ac reactive sputtering

(2009) V.V. Felmetsger et al.   SURFACE & COATINGS TECHNOLOGY

Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators

(2008) Rashed Mahameed et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING