Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM

Published 2013 View Full Article

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Title
Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 112, Issue -, Pages 193-197
Publisher
Elsevier BV
Online
2013-04-17
DOI
10.1016/j.mee.2013.04.007

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