Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel
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Title
Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 121, Issue 2, Pages 025702
Publisher
AIP Publishing
Online
2017-01-12
DOI
10.1063/1.4972979
References
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