Orientation of AlN Grains Nucleated on Different Diamond Substrates by Magnetron Sputtering
出版年份 2018 全文链接
标题
Orientation of AlN Grains Nucleated on Different Diamond Substrates by Magnetron Sputtering
作者
关键词
-
出版物
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume -, Issue -, Pages -
出版商
Wiley
发表日期
2018-09-06
DOI
10.1002/pssa.201800447
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Effect of off-cut angle of hydrogen-terminated diamond(111) substrate on the quality of AlN towards high-density AlN/diamond(111) interface hole channel
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