Atomic layer deposition of organic–inorganic hybrid materials based on saturated linear carboxylic acids

Title
Atomic layer deposition of organic–inorganic hybrid materials based on saturated linear carboxylic acids
Authors
Keywords
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Journal
DALTON TRANSACTIONS
Volume 40, Issue 17, Pages 4636
Publisher
Royal Society of Chemistry (RSC)
Online
2011-03-28
DOI
10.1039/c0dt01716g

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