Fabrication of organic interfacial layers by molecular layer deposition: Present status and future opportunities

标题
Fabrication of organic interfacial layers by molecular layer deposition: Present status and future opportunities
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 4, Pages 040801
出版商
American Vacuum Society
发表日期
2013-05-21
DOI
10.1116/1.4804609

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