Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films using Diethylzinc and Ethylene Glycol

Published 2009 View Full Article

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Title
Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films using Diethylzinc and Ethylene Glycol
Authors
Keywords
-
Journal
CHEMICAL VAPOR DEPOSITION
Volume 15, Issue 4-6, Pages 112-121
Publisher
Wiley
Online
2009-06-05
DOI
10.1002/cvde.200806756

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