Molecular Layer Deposition of Functional Thin Films for Advanced Lithographic Patterning

Published 2011 View Full Article

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Title
Molecular Layer Deposition of Functional Thin Films for Advanced Lithographic Patterning
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 3, Issue 2, Pages 505-511
Publisher
American Chemical Society (ACS)
Online
2011-02-08
DOI
10.1021/am1010805

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