CVD of polymeric thin films: applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes
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Title
CVD of polymeric thin films: applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes
Authors
Keywords
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Journal
REPORTS ON PROGRESS IN PHYSICS
Volume 75, Issue 1, Pages 016501
Publisher
IOP Publishing
Online
2011-12-16
DOI
10.1088/0034-4885/75/1/016501
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