标题
Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 157, Issue 7, Pages P66
出版商
The Electrochemical Society
发表日期
2010-05-29
DOI
10.1149/1.3428705
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Remote Plasma ALD of Platinum and Platinum Oxide Films
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