Atomic Layer Deposition of Platinum Oxide and Metallic Platinum Thin Films from Pt(acac)2and Ozone

Published 2008 View Full Article

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Title
Atomic Layer Deposition of Platinum Oxide and Metallic Platinum Thin Films from Pt(acac)2and Ozone
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 20, Issue 21, Pages 6840-6846
Publisher
American Chemical Society (ACS)
Online
2008-10-08
DOI
10.1021/cm801187t

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