Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3

Published 2008 View Full Article

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Title
Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 10, Pages 103302
Publisher
AIP Publishing
Online
2008-05-20
DOI
10.1063/1.2924406

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