Detection of a Formate Surface Intermediate in the Atomic Layer Deposition of High-κ Dielectrics Using Ozone

Published 2008 View Full Article

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Title
Detection of a Formate Surface Intermediate in the Atomic Layer Deposition of High-κ Dielectrics Using Ozone
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 20, Issue 10, Pages 3248-3250
Publisher
American Chemical Society (ACS)
Online
2008-05-04
DOI
10.1021/cm703667h

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