50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection

Title
50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 8, Pages 085023
Publisher
IOP Publishing
Online
2011-07-13
DOI
10.1088/0960-1317/21/8/085023

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